Fabrication of YBa sub 2 Cu sub 3 O sub 7 minus x superconducting thin films by organometallic chemical vapor deposition

Journal Article · Fri Sep 01 00:00:00 EDT 1989 · Journal of Solid State Chemistry; (USA)

DOI:https://doi.org/10.1016/0022-4596(89)90228-4· OSTI ID:6951097

Kanehori, Keiichi; Sugii, Nobuyuki; Miyauchi, Katsuki ^[1]

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1. Hitachi, Ltd., Tokyo (Japan)

Thin Y-Ba-Cu-O films were fabricated by OMCVD using the tetramethylheptanedione complexes as source materials, and the effects of substrate temperature on crystallographic, electrical, and magnetic properties were examined. Thin films fabricated above 650{degree}C mainly have the orthorhombic YBa{sub 2}Cu{sub 3}O{sub 7{minus}x} structure. But, the film fabricated at 650{degree}C reveals the semiconducting property. Thin films fabricated at 700, 750, and 800{degree}C show the superconducting transition. The respective T{sub c} (onset) and T{sub c} (R = 0) for these films were 84 and 60 K, 85 and 78 K, and 84 and 82 K. The Meissner effect was confirmed for the film grown at 800{degree}C.

• OSTI ID: 6951097
• Journal Information: Journal of Solid State Chemistry; (USA), Journal Name: Journal of Solid State Chemistry; (USA) Vol. 82:1; ISSN JSSCB; ISSN 0022-4596
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360000* -- Materials
360101 -- Metals & Alloys-- Preparation & Fabrication
360601 -- Other Materials-- Preparation & Manufacture
ALKALINE EARTH METALS
BARIUM
CALCULATION METHODS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COMPOSITE MATERIALS
COPPER
DATA
DATA ANALYSIS
DEPOSITION
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
MATERIALS
MEASURING INSTRUMENTS
MEASURING METHODS
METALS
NONMETALS
NUMERICAL DATA
OXYGEN
SUPERCONDUCTING COMPOSITES
SUPERCONDUCTORS
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS
YTTRIUM