In situ formation of YBa/sub 2/Cu/sub 3/O/sub x/ thin films by physical sputtering
We have found that in situ superconducting Y-Ba-Cu-O thin films can be produced by sputtering without the aid of any external O/sub 2/ source during deposition. The films were produced by rf magnetron sputtering from a composite target onto MgO(100) substrates heated at 650 /sup 0/C. Films made in a pure Ar pressure of 24 mTorr and fast cooled in N/sub 2/ ambient contain the tetragonal YBa/sub 2/Cu/sub 3/O/sub x/ phase with x estimated to be 6.1. Films made under the same sputtering conditions but cooled in 30 mTorr oxygen after deposition, show a superconducting transition T/sub c/(R = 0) at 71 K with an onset at 85 K. The T/sub c/(R = 0) rises to 80 K if 0.5 mTorr oxygen was added during sputtering. The experimental results provide conclusive evidence that sufficient oxygen can be incorporated into the films to form the tetragonal YBa/sub 2/Cu/sub 3/O/sub x/ phase simply by physical sputtering from an oxide target. The films absorb additional oxygen and transform into the orthogonal, superconducting phase when subsequently cooled in partial O/sub 2/.
- Research Organization:
- ATandT Bell Laboratories, Murray Hill, New Jersey 07974
- OSTI ID:
- 6480678
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:12; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADSORPTION
ALKALINE EARTH METAL COMPOUNDS
ARGON
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUIDS
GASES
HIGH TEMPERATURE
INFORMATION
LOW TEMPERATURE
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MEDIUM VACUUM
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NITROGEN
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
RARE GASES
SORPTION
SORPTIVE PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE PROPERTIES
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES