Critical parameters in the single-target sputtering of YBa sub 2 Cu sub 3 O sub 7

Journal Article · Tue Oct 15 04:00:00 EDT 1991 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.349120· OSTI ID:5172333

Gavaler, J R; Talvacchio, J; Braggins, T T; Forrester, M G; Greggi, J ^[1]

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1. Westinghouse Science and Technology Center, 1310 Beulah Road, Pittsburgh, Pennsylvania (USA)

The critical parameters in the single-target magnetron sputtering of YBa{sub 2}Cu{sub 3}O{sub 7} have been identified and sufficiently optimized to allow the reproducible deposition of films with {ital T}{sub {ital c}}'s of {gt}90 K and {ital J}{sub {ital c}}'s of {much gt} 10{sup 6} A/cm{sup 2} at 77 K. It was found that during film growth the bombardment of the YBa{sub 2}Cu{sub 3}O{sub 7} by energetic particles must be minimized and also a stronger oxidizing agent than molecular oxygen must be present to obtain films with these properties. Otherwise, films are deposited that, by x-ray diffraction and energy dispersive x-ray spectroscopy analyses, are indistinguishable from the highest-{ital T}{sub {ital c}} 1:2:3 stoichiometric material but which have critical temperatures of {much lt}90 K. Films need not have 1:2:3 overall stoichiometry to have optimum superconducting properties. In such cases the excess elements are present as second-phase particles.

• OSTI ID: 5172333
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 70:8; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
AMINES
AMMONIUM COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CURRENTS
HIGH-TC SUPERCONDUCTORS
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
QUATERNARY COMPOUNDS
SPUTTERING
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES