Preparation of YBa sub 2 Cu sub 3 O sub 7 minus. delta. thin films by magnetron sputtering with in situ plasma oxidation

Journal Article · Sat Sep 01 00:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.346536· OSTI ID:6429983

Yang, S; Wu, P; Ji, Z; Sun, Z; Zhang, R; Li, Y ^[1]; Zhang, S; Zhang, H ^[2]; Liu, H ^[3]

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1. Department of Information Physics, Nanjing University (People's Republic of China)
2. Department of Physics, Nanjing University (People's Republic of China)
3. Center of Material Analysis, Nanjing University, (People's Republic of China)

Superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} thin films with surface roughness Ra{similar to}20 A have been successfully prepared by either rf or dc magnetron sputtering. The substrate temperature was kept at 600--670 {degree}C during deposition and a subsequent {ital in} {ital situ} plasma oxidation treatment was performed at 480--520 {degree}C. The films deposited on single-crystal SrTiO{sub 3} (100) exhibited zero resistance at 91 K and had the critical current density of 3{times}10{sup 6} A/cm{sup 2}. In this paper we describe the influences of fabrication conditions on film superconductivity.

• OSTI ID: 6429983
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 68:5; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTALS
CURRENTS
ELECTRIC CURRENTS
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
MONOCRYSTALS
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PLASMA
SPUTTERING
STRONTIUM COMPOUNDS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES