Epitaxial growth of superconducting YBa sub 2 Cu sub 3 O sub 7 minus x thin films by reactive magnetron sputtering
- Department of Physics, Peking University, Beijing 100871, People's Republic of China (CN)
Perfect epitaxial growth of superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} thin films have been achieved on (100) SrTiO{sub 3}, (110) SrTiO{sub 3}, and (100) ZrO{sub 2} substrates using a modified planar dc magnetron sputtering system. The films exhibit zero resistances at 87--90 K with transition widths of about 2 K. The critical current density of 1.4{times}10{sup 6} A/cm{sup 2} at 77 K so far has been measured on the (100) SrTiO{sub 3} substrate. The epitaxial orientation of the thin films was influenced by the substrate orientation, the substrate temperature, and the oxygen partial pressure. The quality of growth and the epitaxial orientation of the films were examined by electron channeling, x-ray diffraction, and reflection high-energy electron diffraction techniques. The preferential epitaxial orientation is discussed.
- OSTI ID:
- 5683789
- Journal Information:
- Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:9; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
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656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHANNELING
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTAL STRUCTURE
CURRENT DENSITY
CURRENTS
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRON CHANNELING
EPITAXY
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
LOW TEMPERATURE
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
VAPOR PHASE EPITAXY
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES