Sputter deposition of YBa sub 2 Cu sub 3 O sub 7 minus x films on Si at 500 degree C with conducting metallic oxide as a buffer layer
- State University of New York at Buffalo, Buffalo, New York 14260 (USA). Department of Electrical and Computer Engineering State University of New York at Buffalo, Buffalo, New York 14260 (USA). Institute on Superconductivity, Room 217, Bonner Hall
Superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} thin films were deposited on Si substrates at 500 {degree}C by rf magnetron sputtering from a stoichiometric oxide target. Metallic oxide RuO{sub 2}, sputtered by reactive dc magnetron, was used as a buffer layer to nucleate the superconducting film and minimize the reactions between Si and superconductor. The as-deposited thin films, without further post high-temperature annealing, were completely superconductive at 79 K. Very smooth surface morphology was demonstrated by scanning electron microscopy. X-ray diffraction data indicated that the films had a randomly oriented polycrystalline structure. Auger electron spectroscopy did not reveal interdiffusion of elements in the three layers.
- OSTI ID:
- 7073923
- Journal Information:
- Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:3; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
High T/sub c/ YBa/sub 2/Cu/sub 3/O/sub 7/. sqrt. /sub x/ thin films on Si substrates by dc magnetron sputtering from a stoichiometric oxide target
Preparation and characterization of high T sub c YBa sub 2 Cu sub 3 O sub 7 minus x thin films on silicon by dc magnetron sputtering from a stoichiometric oxide target
Related Subjects
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ATOM TRANSPORT
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
INTERFACES
NEUTRAL-PARTICLE TRANSPORT
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATION TRANSPORT
SEMIMETALS
SILICON
SORPTIVE PROPERTIES
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE PROPERTIES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES