C-axis oriented YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ superconducting films by metalorganic chemical vapor deposition

Journal Article · Mon Jan 23 04:00:00 EST 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.101378· OSTI ID:6621680

Zhang, K; Kwak, B S; Boyd, E P; Wright, A C; Erbil, A

Highly textured single phase superconducting YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ films have been successfully grown on the yttria-stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. The as-deposited films grown at 650 /sup 0/C were homogeneous mixtures of the related metal oxides and carbonates. Subsequent thermal annealing under oxygen flow yielded single phase superconducting films whose thickness corresponded to the deposition rates of approximately 10 ..mu..m/h. After the post-annealing the films deposited on the yttria-stabilized zirconia substrates exhibited a highly textured x-ray pattern with c axis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93 K with the resistance becoming zero at 84 K.

• Research Organization: School of Physics, Georgia Institute of Technology, Atlanta, Georgia 30332
• OSTI ID: 6621680
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:4; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL COMPOSITION
CHEMICAL VAPOR DEPOSITION
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
DATA
DEPOSITION
DIFFRACTION
DIMENSIONS
ELECTRON MICROSCOPY
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INFORMATION
LOW TEMPERATURE
MICROSCOPY
MORPHOLOGY
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SCANNING ELECTRON MICROSCOPY
SCATTERING
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THICKNESS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES