Single target sputtering of superconducting YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ thin films on Si (100)
Journal Article
·
· Appl. Phys. Lett.; (United States)
Thin films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ have been grown on (100) silicon substrates by single target rf diode sputtering. Yttria-stabilized zirconia buffer layers were used to minimize substrate-film reactions. Off-stoichiometric targets were used to compensate for differences between film and target stoichiometries. The composition of the superconducting layer is also influenced by post-deposition anneals, with films closer to the desired stoichiometry resulting from the higher temperature anneals. Film thicknesses spanned the 0.5--2.0 ..mu..m range and the onset and zero resistance ( rho<10/sup -7/ ..cap omega.. cm) temperatures were found to be 95 and 70 K, respectively, for 1.8-..mu..m-thick films.
- Research Organization:
- Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213-3890
- OSTI ID:
- 6443973
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:9; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Mon Jul 01 00:00:00 EDT 1991
· Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)
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OSTI ID:5563686
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OSTI ID:6152042
Thickness and annealing dependence of the superconducting transition temperature of YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ thin films on oxidized silicon and polycrystalline alumina substrates
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· Appl. Phys. Lett.; (United States)
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OSTI ID:6627459
Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL TEMPERATURE
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
FILMS
HEAT TREATMENTS
LOW TEMPERATURE
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THICKNESS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL TEMPERATURE
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
FILMS
HEAT TREATMENTS
LOW TEMPERATURE
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THICKNESS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES