On-axis sputter deposition of superconducting YBa sub 2 Cu sub 3 O sub 7-. delta. on Si(100)

Journal Article · Mon Jul 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577243· OSTI ID:5563686

Stamper, A K; Greve, D W; Schlesinger, T E ^[1]

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1. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213 (USA)

Superconducting thin films of YBa{sub 2}Cu{sub 3}O{sub 7-{delta}} have been deposited using radio-frequency diode sputtering from a single composite target. These films were deposited on silicon substrates at substrate temperatures up to 600 {degree}C using a 90% argon and 10% oxygen sputtering gas mixture. Yttria-stabilized ZrO{sub 2} buffer layers were employed both for electrical isolation and to minimize the reaction between the silicon and the superconductor. The composition and electrical properties of these films, which were deposited on axis from 5 cm targets, were approximately constant over most of the 5 cm substrates and were reproducible. The effect of the sputtering gas pressure, target composition, and substrate temperature on the film composition have been studied. The films deposited on {ital in} {ital situ} heated substrates had {ital T}{sub {ital c}zero}=87 K with 10% to 90% transition widths of less than 5 K and were {ital c}-axis oriented. Films deposited on unheated substrates required processing at higher temperatures, displayed slightly lower resistive transitions (84 K), and were randomly oriented.

• OSTI ID: 5563686
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:4; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
ELEMENTS
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES