Large area uniform deposition of YBa{sub 2}Cu{sub 3}O{sub 7} thin films by a 90{degree} off-axis sputtering technique
Book
·
OSTI ID:392192
- Duke Univ., Durham, NC (United States). Dept. of Mechanical Engineering and Materials Science
Large area uniform deposition of YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) thin films on 8 inch diameter wafers, using a 3 inch diameter sputtering target and optimized substrate rotation in a single target 90{degree} off-axis sputtering technique, is reported. The variation in thickness, composition and superconducting properties was studied as a function of substrate position on stationary and rotating substrates. The films deposited from a 3 in. target on rotating substrates displayed uniform thickness (<{+-}5% variation) and composition (<2.3% deviation from target stoichiometry) and a consistently high transition temperature ({Tc} > 88.3 K) over an 8 in. diameter area.
- OSTI ID:
- 392192
- Report Number(s):
- CONF-951155--; ISBN 1-55899-304-5
- Country of Publication:
- United States
- Language:
- English
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