Commercial-scale production of high-temperature superconductors. Annual report, 15 Sep 90-15 Sep 91
Thin films of YBa2Cu3O(7-x) were deposited onto substrates of up to three inch diameter by RF planar magnetron sputtering from an 8 inch diameter Y-Ba-Cu-O target. By locating the substrate above the center of the magnetron erosion ring and by placing a 'negative ion shield' between the substrate and the target, negative ion effects are avoided. A large area, backside radiant heater brings the bare substrates up to the temperatures necessary for in situ growth of superconducting YBa2Cu3O(7-x) films. The YBCO sputter deposition is completely automated and a throughput of 10 two inch diameters per week from a single target is easily achieved. YBCO films have been grown on MgO and LaAlO3 substrates with critical temperature > or = 90 K, change of temperature < 1 K, and critical current density > 1 million A/sq cm at 77 K. Microwave resistance for YBCO films on two inch diameter LaAlO3 substrates has been measured and found to be < 0.62 milliohms with a uniformity of better than + or - 5%. On two inch diameter substrates, uniformity of thickness and room temperature resistivity of < 7% have been achieved. The compositional uniformity of Y, Ba, and Cu across a two inch diameter substrate was found to be better than + or - 1%. Preliminary work on the growth of Y-ZrO2 dielectric layers and epitaxial YBCO/PLZT bilayers has been initiated.
- Research Organization:
- CVC Products, Inc., Rochester, NY (United States)
- OSTI ID:
- 5835262
- Report Number(s):
- AD-A-244355/4/XAB; CNN: N00014-90-c-0206
- Country of Publication:
- United States
- Language:
- English
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Cermets
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360207 -- Ceramics
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& Refractories-- Superconducting Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
HIGH-TC SUPERCONDUCTORS
JUNCTIONS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PRODUCTION
SPUTTERING
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
TEMPERATURE RANGE
TEMPERATURE RANGE 0065-0273 K
THERMODYNAMIC PROPERTIES
THICKNESS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES