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Metalorganic chemical vapor deposition of highly textured superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ films

Conference ·
OSTI ID:6361032
C-axis textured single phase superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ films have been successfully grown on the yttria-stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. After the post annealing the films deposited on the yttria-stabilized zirconia substrates exhibited a highly textured x-ray pattern with c-axis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93K with the resistance becoming zero at 84K. The films deposited on sapphire show a semiconducting feature in the normal state with a broad superconducting transition at much lower temperatures (10-40K). In order to gain some insight onto the growth process, we also studied the mass transport of metalorganic compounds as a function of source temperature, flow rate and reactor pressure. 15 refs., 10 figs.
Research Organization:
Georgia Inst. of Tech., Atlanta (USA). School of Physics
DOE Contract Number:
FG05-86ER45266
OSTI ID:
6361032
Report Number(s):
CONF-881127-4; ON: DE89007221
Country of Publication:
United States
Language:
English