Studies of interfacial composition of TiN films formed by plasma-assisted chemical vapor deposition using an in-situ scratching device

Journal Article · Fri Oct 31 23:00:00 EST 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573681· OSTI ID:6998431

Hilton, M R; Middlebrook, A M; Rodrigues, G; Salmeron, M; Somorjai, G A

The interfacial composition of plasma-assisted chemical vapor deposited TiN films on M2 tool steel is reported. An in-situ scratcher with a scratch adhesion test type diamond stylus was used to create scratches in ultrahigh vacuum (UHV). Auger electron spectroscopy analysis of the adhesive mode failures revealed a sharp chlorine concentration gradient at the exposed surface representing the prior interface. The scratch removal technique data is compared to sputter depth profile data. Scanning electron microscopy and energy dispersive spectroscopy investigation of the scratches following the UHV work is also presented and discussed.

• Research Organization: Center for Advanced Materials, Lawrence Berkeley Laboratory, and Department of Materials Science and Mining Engineering and Department of Chemistry, University of California at Berkeley, Berkeley, California 94720
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 6998431
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:6; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ABRASION
ADHESION
ALLOYS
AUGER ELECTRON SPECTROSCOPY
CHEMICAL COATING
CHEMICAL COMPOSITION
CHEMICAL VAPOR DEPOSITION
CHLORINE
COATINGS
DEPOSITION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
HALOGENS
INTERFACES
IRON ALLOYS
IRON BASE ALLOYS
MICROSCOPY
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
PNICTIDES
SCANNING ELECTRON MICROSCOPY
SPECTROSCOPY
STEELS
SURFACE COATING
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TOOLS
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS