Plasma-assisted synthesis and physical chemical characterization of titanium nitride films
TiN films synthesized by radio-frequency plasma-assisted chemical vapor deposition onto M2 tool steel were investigated. TiCl/sub 4/ with NH/sub 3/ or with H/sub 2/ and N/sub 2/ were used 0.2 to 1.0 torr. Film composition, structure, and mechanical properties were strongly influenced by chlorine concentration within the filsm and at the film-substrate interfaces. Chlorine concentration in the films decreased with increasing deposition temperature. A transition from an amorphous zone one morphology, to a fine-grained zone T morphology, to a highly crystalline zone two morphology with (200) preferred orientation was observed with increasing deposition temperature. Films formed at temperatures lower than 400/sup 0/C exhibited poor mechanical properties. At 400/sup 0/C and above, film adhesion was influenced by initial deposition conditions. Films formed from TiCl/sub 4/ and NH/sub 3/ had low scratch adhesion test critical loads, with fracture occurring at the interface. Auger analysis of scratch tracks created in vacuum revealed a high interfacial chlorine content. IN contrast, films synthesized with H/sub 2/ and N/sub 2/ exhibited higher scratch adhesion test critical loads, with fracture within the film. Auger depth profilng revealed no chlorine accumulation at the interfaces of H/sub 2/-N/sub 2/-based films. Early film growth was accompanied by TiN islands. A plasma was essential for TiN synthesis from TiCl/sub 4/, H/sub 2/, and N/sub 2/. The chlorine concentrations of titanium carbonitride films, synthesized in a plasma with the addition of CH/sub 4/ showed greater variation at fixed deposition temperature than those of pure nitride films. The use of an organometallic source, titanium tetrakis dimethylamide, Ti(N(CH/sub 3/)/sub 2/)/sub 4/, resulted in the formation of carbonitride powders. 140 refs., 88 figs
- Research Organization:
- Lawrence Berkeley Lab., CA (USA)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 5312357
- Report Number(s):
- LBL-24584; ON: DE88007365
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ADHESION
ALKANES
ALLOYS
AMMONIA
AUGER ELECTRON SPECTROSCOPY
CARBONITRIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
COHERENT SCATTERING
CRYSTAL STRUCTURE
CUTTING TOOLS
DEPOSITION
DIFFRACTION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
FILMS
HYDRIDES
HYDROCARBONS
HYDROGEN
HYDROGEN COMPOUNDS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
METHANE
MICROSCOPY
MICROSTRUCTURE
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
PHYSICAL PROPERTIES
PLASMA
PNICTIDES
PROTECTIVE COATINGS
SCANNING ELECTRON MICROSCOPY
SCATTERING
SPECTROSCOPY
STEELS
SURFACE COATING
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TOOLS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION