TiN coatings on M2 steel produced by plasma assisted chemical vapor deposition
Conference
·
OSTI ID:5776127
TiN films were deposited onto M2 steel using plasma-assisted chemical vapor deposition. TiCl/sub 4/, N/sub 2/ and H/sub 2/ were the reactant gases used at 1 torr. A plasma was essential for TiN formation at 500/sup 0/C and below. At 500/sup 0/C, a highly crystalline stoichiometric TiN coating was formed with a (200) surface orientation and having a columnar Zone 2 grain structure. At 400/sup 0/C, a Zone T structure with an additional amorphous component was observed. Both types of films had good adherence with scratch adhesion critical loads comparable to values for sputtered TiN. The Zone 2 films failed by cracking and occasional chipping within the coating. The Zone T films failed by cracking in the coating and by chipping, within the coating and by the interface. AES depth profiling of thin films indicates that the interface was sharp and no accumulation of Cl is observed. AES and SEM suggest that distinct TiN islands or nuclei are present in the early stages of growth. The use of an organometallic source, titanium tetrakis (dimethylamide), resulted in the formation of carbonitride powders. 17 refs., 4 figs.
- Research Organization:
- Lawrence Berkeley Lab., CA (USA)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 5776127
- Report Number(s):
- LBL-23131; CONF-870388-15; ON: DE88003189
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ADHESION
ALLOYS
AMMONIA
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CHLORINE
COATINGS
CRACKS
CRYSTAL STRUCTURE
DEPOSITION
ELEMENTS
FILMS
GRAIN ORIENTATION
HALOGENS
HARDNESS
HYDRIDES
HYDROGEN COMPOUNDS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
NUCLEATION
ORIENTATION
PLASMA
PNICTIDES
STEELS
SURFACE COATING
SURFACES
TEMPERATURE DEPENDENCE
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ADHESION
ALLOYS
AMMONIA
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CHLORINE
COATINGS
CRACKS
CRYSTAL STRUCTURE
DEPOSITION
ELEMENTS
FILMS
GRAIN ORIENTATION
HALOGENS
HARDNESS
HYDRIDES
HYDROGEN COMPOUNDS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
NUCLEATION
ORIENTATION
PLASMA
PNICTIDES
STEELS
SURFACE COATING
SURFACES
TEMPERATURE DEPENDENCE
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS