Studies on ion scattering and sputtering processes relevant to ion beam sputter deposition of multicomponent thin films

Conference · Sun Jan 01 04:00:00 EST 1989

OSTI ID:6965182

Auciello, O ^[1]; Ameen, M S; Kingon, A I ^[2]; Krauss, A R; Ray, M A ^[3]

---

1. North Carolina State Univ., Raleigh, NC (USA). Dept. of Materials Science and Engineering Microelectronics Center of North Carolina, Research Triangle Park, NC (USA)
2. North Carolina State Univ., Raleigh, NC (USA). Dept. of Materials Science and Engineering
3. Argonne National Lab., IL (USA)

Results from computer simulation and experiments on ion scattering and sputtering processes in ion beam sputter deposition of high Tc superconducting and ferroelectric thin films are presented. It is demonstrated that scattering of neutralized ions from the targets can result in undesirable erosion of, and inert gas incorporation in, the growing films, depending on the ion/target atom ass ratio and ion beam angle of incidence/target/substrate geometry. The studies indicate that sputtering Kr{sup +} or Xe{sup +} ions is preferable to the most commonly used Ar{sup +} ions, since the undesirable phenomena mentioned above are minimized for the first two ions. These results are used to determine optimum sputter deposition geometry and ion beam parameters for growing multicomponent oxide thin films by ion beam sputter-deposition. 10 refs., 5 figs.

• Research Organization: Argonne National Lab., IL (USA)
• Sponsoring Organization: DOD; DOE/ER; NSF
• DOE Contract Number: W-31109-ENG-38; FG05-88ER45359
• OSTI ID: 6965182
• Report Number(s): CONF-891119-123; ON: DE90010071; CNN: N-00014-88-K-0525; N-00014-88-K-0526; DMR-8807367
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
FERROELECTRIC MATERIALS
FILMS
HIGH-TC SUPERCONDUCTORS
ION BEAMS
IONS
KRYPTON IONS
OXIDES
OXYGEN COMPOUNDS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
XENON IONS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES