Studies on ion scattering and sputtering processes relevant to ion beam sputter deposition of multicomponent thin films

Conference · Sun Jan 01 00:00:00 EST 1989

OSTI ID:6965182

Auciello, O ^[1]; Ameen, M S; Kingon, A I ^[2]; Krauss, A R; Ray, M A ^[3]

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1. North Carolina State Univ., Raleigh, NC (USA). Dept. of Materials Science and Engineering Microelectronics Center of North Carolina, Research Triangle Park, NC (USA)
2. North Carolina State Univ., Raleigh, NC (USA). Dept. of Materials Science and Engineering
3. Argonne National Lab., IL (USA)

Results from computer simulation and experiments on ion scattering and sputtering processes in ion beam sputter deposition of high Tc superconducting and ferroelectric thin films are presented. It is demonstrated that scattering of neutralized ions from the targets can result in undesirable erosion of, and inert gas incorporation in, the growing films, depending on the ion/target atom ass ratio and ion beam angle of incidence/target/substrate geometry. The studies indicate that sputtering Kr{sup +} or Xe{sup +} ions is preferable to the most commonly used Ar{sup +} ions, since the undesirable phenomena mentioned above are minimized for the first two ions. These results are used to determine optimum sputter deposition geometry and ion beam parameters for growing multicomponent oxide thin films by ion beam sputter-deposition. 10 refs., 5 figs.

• Research Organization: Argonne National Lab., IL (USA)
• Sponsoring Organization: USDOD; DOE/ER; National Science Foundation (NSF)
• DOE Contract Number: W-31109-ENG-38; FG05-88ER45359
• OSTI ID: 6965182
• Report Number(s): CONF-891119-123; ON: DE90010071; CNN: N-00014-88-K-0525; N-00014-88-K-0526; DMR-8807367; TRN: 90-026895
• Resource Relation: Conference: Materials Research Society fall meeting, Boston, MA (USA), 27 Nov - 2 Dec 1989
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
SPUTTERING
COPPER OXIDES
HIGH-TC SUPERCONDUCTORS
YTTRIUM OXIDES
DEPOSITION
FERROELECTRIC MATERIALS
ION BEAMS
KRYPTON IONS
SUPERCONDUCTING FILMS
XENON IONS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
COPPER COMPOUNDS
FILMS
IONS
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
656100 - Condensed Matter Physics- Superconductivity