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Comparison of performance of an analytical electron microscope at 300 and 100 kV

Journal Article · · Mater. Res. Soc. Symp. Proc.; (United States)
OSTI ID:6957908
Preliminary results on the performance of an analytical electron microscope (AEM) operating at 300 kV have been obtained and compared with the performance at 100 kV. Some features of the anticipated improvements for transmission electron microscopy (TEM) imaging, convergent beam electron diffraction (CBED), energy dispersive X-ray spectroscopy (EDS), and electron energy loss spectroscopy (EELS) have been studied from the aspect of materials science applications. The electron microscope used was a Philips EM430T operated with a LaB/sub 6/ cathode and equipped with EDAX 9100/90 EDS and Gatan 607 EELS systems. 12 references, 9 figures.
Research Organization:
Oak Ridge National Lab., TN
DOE Contract Number:
AC05-84OR21400
OSTI ID:
6957908
Journal Information:
Mater. Res. Soc. Symp. Proc.; (United States), Journal Name: Mater. Res. Soc. Symp. Proc.; (United States) Vol. 41; ISSN MRSPD
Country of Publication:
United States
Language:
English