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U.S. Department of Energy
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Microanalysis by electron energy loss spectroscopy at 300kV

Conference ·
OSTI ID:5755362
Some features of the anticipated improvements in microanalysis by electron energy loss spectroscopy (EELS) at 300 kV compared to opeation at 100kV have been studied with the use of a Philips EM430T equipped with Gatan 607 EELS and EDAX 9100/70 systems. Detailed measurements have been made on a range of specimens, with emphasis on boron nitride and silicon carbide.
Research Organization:
Oak Ridge National Lab., TN (USA)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
5755362
Report Number(s):
CONF-860854-2; ON: DE86009306
Country of Publication:
United States
Language:
English