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Influence of specimen thickness in quantitative electron-energy-loss spectroscopy: II

Conference ·
OSTI ID:6094785
Homogenous specimens of boron nitride (BN), nickel oxide (NiO), and aluminium oxide (Al/sub 2/O/sub 3/) were analyzed as a function of thickness (0.25 < t/lambda < 2.5) for scattering angles of 2.6, 5.7, and 14.7 mr at an incident beam energy of 100 keV using a Philips EM400 TEM. EELS measurements were made with both a Gatan 607 EELS and a ..pi../2 magnetic sector analyzer designed by the author. EELS spectra were recorded at energy resolutions approx. 3 eV over the range 0 to 3 keV, on a EDAX PV9100 MCA. Deconvolution of multiple scattering was accomplished using the method described by Leapman and Swyt.
Research Organization:
Argonne National Lab., IL (USA)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
6094785
Report Number(s):
CONF-830815-6; ON: DE83010739
Country of Publication:
United States
Language:
English