Refractory resistors with etch stop for superconductor integrated circuits

Patent · Tue Feb 27 04:00:00 EST 1990

OSTI ID:6944293

Przybysz, J X; Buttan, J

This patent describes a method for preparing molybdenum resistors in a superconductor integrated circuit. It comprises: depositing superconductor film on a support; patterning the superconductor film to provide a patterned superconductor and exposed support; applying an aluminum film on the superconductor film and the exposed support; applying a molybdenum film on the aluminum film to provide an aluminum-molybdenum, etch-stop interface; applying a patterned resist film on the molybdenum film to provide exposed molybdenum film and unexposed molybdenum film; etching the exposed molybdenum film to define the molybdenum resistor and expose a portion of the aluminum-molybdenum, etch-stop interface; and oxidizing the exposed aluminum-molybdenum, etch-stop interface. The aluminum-molybdenum, etch-stop interface protects the patterned superconductor film and the support and increases processing margins for the etch time. Also described is a molybdenum resistor configuration for a superconductor integrated circuit.

• Assignee: Westinghouse Electric Corp., Pittsburgh, PA
• Patent Number(s): US 4904980; A
• Application Number: PPN: US 7-234436A
• OSTI ID: 6944293
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
426001* -- Engineering-- Superconducting Devices & Circuits-- (1990-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM
CHEMICAL REACTIONS
DEPOSITION
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
FILMS
INTEGRATED CIRCUITS
METALS
MICROELECTRONIC CIRCUITS
MOLYBDENUM
OXIDATION
RESISTORS
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENTS