Refractory resistors with etch stop for superconductor integrated circuits
Patent
·
OSTI ID:5731040
This paper describes a molybdenum resistor configuration for a superconductor integrated circuit. It comprises: a support; areas of superconductor film covering portions of the support; an at least 50 Angstroms thick titanium film on the areas of superconductor film; a titanium-molybdenum etch stop interface on the titanium film; a molybdenum film on the titanium-molybdenum etch stop interface; and a titanium oxide film on the support covering portions of the support and not covered by the areas of superconductor film.
- Assignee:
- Westinghouse Electric Corp., Pittsburgh, PA (USA)
- Patent Number(s):
- A; US 5021867
- Application Number:
- PPN: US 7-359018
- OSTI ID:
- 5731040
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHALCOGENIDES
DESIGN
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
FILMS
INTEGRATED CIRCUITS
INTERFACES
METALS
MICROELECTRONIC CIRCUITS
MOLYBDENUM
OXIDES
OXYGEN COMPOUNDS
REFRACTORIES
RESISTORS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHALCOGENIDES
DESIGN
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
FILMS
INTEGRATED CIRCUITS
INTERFACES
METALS
MICROELECTRONIC CIRCUITS
MOLYBDENUM
OXIDES
OXYGEN COMPOUNDS
REFRACTORIES
RESISTORS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS