Method for forming refractory resistors with etch stop for superconductor integrated circuits
Patent
·
OSTI ID:5589246
This paper describes a method for preparing molybdenum resistors in a superconductor integrated circuit. It comprises: depositing superconductor film on a support; patterning the superconductor film to provide a patterned superconductor and exposed support; applying an titanium film on the superconductor film and the exposed support; applying a molybdenum film on the titanium film to provide an titanium-molybdenum, etch-stop interface; applying a patterned resist film on the molybdenum film to provide exposed molybdenum film and unexposed molybdenum film; etching the exposed molybdenum film to define the molybdenum resistor and expose a portion of the titanium-molybdenum, etch-stop interface; and oxidizing the exposed titanium-molybdenum, etch-stop interface, whereby the titanium-molybdenum, etch-stop interface protects the patterned superconductor film and the support and increases processing margins for the etch time.
- Assignee:
- Westinghouse Electric Corp., Pittsburgh, PA (United States)
- Patent Number(s):
- A; US 5069748
- Application Number:
- PPN: US 7-644131
- OSTI ID:
- 5589246
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
24 POWER TRANSMISSION AND DISTRIBUTION
240100 -- Power Systems-- (1990-)
36 MATERIALS SCIENCE
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
42 ENGINEERING
426000 -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COMPOSITION
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
FILMS
INTEGRATED CIRCUITS
INTERFACES
METALS
MICROELECTRONIC CIRCUITS
MOLYBDENUM
REFRACTORIES
RESISTORS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SURFACE FINISHING
THIN FILMS
TITANIUM
TRANSITION ELEMENTS
240100 -- Power Systems-- (1990-)
36 MATERIALS SCIENCE
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
42 ENGINEERING
426000 -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COMPOSITION
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
FILMS
INTEGRATED CIRCUITS
INTERFACES
METALS
MICROELECTRONIC CIRCUITS
MOLYBDENUM
REFRACTORIES
RESISTORS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SURFACE FINISHING
THIN FILMS
TITANIUM
TRANSITION ELEMENTS