Nanometer-scale patterning of high-[ital T][sub [ital c]] superconductors for Josephson junction-based digital circuits

Journal Article · Tue Nov 01 00:00:00 EST 1994 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.587480· OSTI ID:6937602

Wendt, J R; Plut, T A; Corless, R F ^[1]; Martens, J S; Berkowitz, S; Char, K; Johansson, M ^[2]; Hou, S Y; Phillips, J M ^[3]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-0603 (United States)
2. Conductus, Sunnyvale, California 94086 (United States)
3. AT T Bell Laboratories, Murray Hill, New Jersey 07974 (United States)

A straightforward method for nanometer-scale patterning of high-[ital T][sub [ital c]] superconductor thin films is discussed. The technique combines direct-write electron beam lithography with well-controlled aqueous etches and is applied to the fabrication of Josephson junction nanobridges in high-quality, epitaxial thin-film YBa[sub 2]Cu[sub 3]O[sub 7]. We present the results of our studies of the dimensions, yield, uniformity, and mechanism of the junctions along with the performance of a representative digital circuit based on these junctions. Direct current junction parameter statistics measured at 77 K show critical currents of 27.5 [mu]A[plus minus]13% for a sample set of 220 junctions. The Josephson behavior of the nanobridge is believed to arise from the aggregation of oxygen vacancies in the nanometer-scale bridge.

• DOE Contract Number: AC04-94AL85000
• OSTI ID: 6937602
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Vol. 12:6; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
DIGITAL CIRCUITS
JOSEPHSON JUNCTIONS
FABRICATION
BARIUM OXIDES
COPPER OXIDES
CRITICAL CURRENT
ELECTRON BEAMS
ETCHING
HIGH-TC SUPERCONDUCTORS
PRINTED CIRCUITS
SUPERCONDUCTING FILMS
YTTRIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BEAMS
CHALCOGENIDES
COPPER COMPOUNDS
CURRENTS
ELECTRIC CURRENTS
ELECTRONIC CIRCUITS
FILMS
JUNCTIONS
LEPTON BEAMS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
665412* - Superconducting Devices- (1992-)