Josephson junction

Wendt, Joel R; Plut, Thomas A; Martens, Jon S

Josephson junction

Patent · Sat Dec 31 23:00:00 EST 1994

OSTI ID:869862

Wendt, Joel R ^[1]; Plut, Thomas A ^[1]; Martens, Jon S ^[2]

Albuquerque, NM
Sunnyvale, CA

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

Research Organization:: AT & T CORP

DOE Contract Number:: AC04-76DP00789

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: US 5411937

OSTI ID:: 869862

Country of Publication:: United States

Language:: English

References (9)

Measurement of conduction properties of highly resistive superconducting microbridges Chen, X.; Yoshikawa, N.; Sugahara, M. IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1 https://doi.org/10.1109/77.233567	journal	March 1993
Improved aqueous etchant for high T _c superconductor materials Ashby, Carol I. H.; Martens, Jon; Plut, Thomas A. Applied Physics Letters, Vol. 60, Issue 17 https://doi.org/10.1063/1.107065	journal	April 1992
Orientation Dependence of Grain-Boundary Critical Currents in Y Ba 2 Cu 3 O 7 − δ Bicrystals Dimos, D.; Chaudhari, P.; Mannhart, J. Physical Review Letters, Vol. 61, Issue 2 https://doi.org/10.1103/PhysRevLett.61.219	journal	July 1988
Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions Bao, Z.; Ji, L.; Lin, K. Y. IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1 https://doi.org/10.1109/77.233943	journal	March 1993
Millimeter wave responses of YBCO variable-thickness bridges Park, C. H.; Kobayashi, T.; Goto, T. IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1 https://doi.org/10.1109/77.233416	journal	March 1993
High temperature superconducting Josephson transmission lines for pulse and step sharpening Martens, J. S.; Wendt, J. R.; Hietala, V. M. Journal of Applied Physics, Vol. 72, Issue 12 https://doi.org/10.1063/1.351906	journal	December 1992
YBa ₂ Cu ₃ O ₇ nanobridges fabricated by direct‐write electron beam lithography Wendt, J. R.; Martens, J. S.; Ashby, C. I. H. Applied Physics Letters, Vol. 61, Issue 13 https://doi.org/10.1063/1.107508	journal	September 1992
Bi‐epitaxial grain boundary junctions in YBa ₂ Cu ₃ O ₇ Char, K.; Colclough, M. S.; Garrison, S. M. Applied Physics Letters, Vol. 59, Issue 6 https://doi.org/10.1063/1.105355	journal	August 1991
Substrate step‐edge YBa ₂ Cu ₃ O ₇ rf SQUIDs Daly, K. P.; Dozier, W. D.; Burch, J. F. Applied Physics Letters, Vol. 58, Issue 5 https://doi.org/10.1063/1.104581	journal	February 1991

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Josephson junction

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References (9)

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