Josephson junction
Patent
·
OSTI ID:46314
A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material. 10 figs.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- Patent Number(s):
- US 5,411,937/A/
- Application Number:
- PAN: 8-062,672
- OSTI ID:
- 46314
- Resource Relation:
- Other Information: PBD: 2 May 1995
- Country of Publication:
- United States
- Language:
- English
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