YBa sub 2 Cu sub 3 O sub 7 nanobridges fabricated by direct-write electron beam lithography

Journal Article · Mon Sep 28 04:00:00 EDT 1992 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.107508· OSTI ID:7266737

Wendt, J R; Martens, J S; Ashby, C I.H.; Plut, T A; Hietala, V M; Tigges, C P; Ginley, D S ^[1]; Siegal, M P; Phillips, J M ^[2]; Hohenwarter, G K.G. ^[3]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)
2. AT T Bell Laboratories, Murray Hill, New Jersey 07974 (United States)
3. University of Wisconsin-Madison, ECE Department, Madison, Wisconsin 53706 (United States)

A direct method for nondamaging, nanometer-scale patterning of high {ital T}{sub {ital c}} superconductor thin films is presented. We have fabricated superconducting nanobridges in high-quality, epitaxial thin-film YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) by combining direct-write electron beam lithography and an improved aqueous etchant. Weak links with both length and width dimensions less than 20 nm have exhibited critical currents at 77 K of 4--20 {mu}A and {ital I}{sub {ital c}R{ital n}} products of 10--100 {mu}V which compare favorably with results for other YBCO junction technologies. We have used this technique in the fabrication of a shock-wave pulse former as an initial demonstration of its applicability to monolithic superconductive electronics.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 7266737
• Journal Information: Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 61:13; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
665412 -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC BRIDGES
ELECTRICAL EQUIPMENT
EQUIPMENT
ETCHING
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
JOSEPHSON JUNCTIONS
JUNCTIONS
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
SURFACE FINISHING
SURFACE TREATMENTS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES