Characterization of chemically prepared PZT thin films

Conference · Sun Dec 31 23:00:00 EST 1989

DOI:https://doi.org/10.1557/PROC-200-159· OSTI ID:6925442

Tuttle, B A; Schwartz, R W; Doughty, D H; Voigt, J A ^[1]; Carim, A H ^[2]

---

1. Sandia National Labs., Albuquerque, NM (USA)
2. New Mexico Univ., Albuquerque, NM (USA)

We have systematically varied processing parameters to fabricate PZT 53/47 thin films. Polycrystalline PZT thin films were fabricated by spin depositing Pt coated SiO{sub 2}/Si substrates with alkoxide solutions. Our study focused on two process parameters: (1) heating rate and (2) excess Pb additions. We used rapid thermal processing techniques to vary heating rates from 3{degree}C/min to 8400{degree}C/min. Films were characterized with the following excess Pb additions: 0, 3, 5, and 10 mol %. For all process variations, films with greater perovskite content had better ferroelectric properties. Our best films were fabricated using the following process parameters: an excess Pb addition of 5 mol %, a heating rate of 8400{degree}C/min and annealing conditions of 700{degree}C for 1 min. Films fabricated using these process conditions had a remanent polarization of 0.27 C/m{sup 2} and a coercive field of 3.4 MV/m. 12 refs., 4 figs.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• Sponsoring Organization: DOE/DP
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6925442
• Report Number(s): SAND-90-1077C; CONF-9004193--1; ON: DE90010831
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
360603 -- Materials-- Properties
ALKOXIDES
ANNEALING
DEPOSITION
ELEMENTS
FILMS
HEAT TREATMENTS
HEATING RATE
LEAD
LEAD COMPOUNDS
METALS
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
PZT
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS