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Synthesis of highly oriented lead zirconate-lead titanate film using metallo-organics

Journal Article · · Journal of the American Ceramic Society; (United States)
; ; ; ; ;  [1]
  1. Dept. of Applied Chemistry, School of Engineering, Nagoya Univ., Nagoya 464 (Japan)
This paper reports on crack-free Pb(Zr,Ti)O[sub 3] (PZT) thin films with preferred orientation that were prepared successfully on MgO (100), SrTiO[sub 3] (100), and Pt/Ti/SiO[sub 2]/Si substrates from metal alkoxide solutions. Calcination of precursor films in a H[sub 2]O[minus] O[sub 2] gas mixture was found to be effective not only for low-temperature crystallization of perovskite PZT, but also for obtaining the preferred orientation of PZT films. Single-phase PZT films with high preferred orientation were synthesized on MgO (100) and Pt/Ti/SiO[sub 2]/Si substrates at 550[degrees] and 600[degrees] C for 2 h, respectively. The PZT film on the Pt/Ti/Si-O[sub 2]/Si substrate showed a permittivity of 520, tan [delta] of 0.03, a remanent polarization of 24 [mu]C/cm[sup 2], and a coercive field of 54 kV/cm.
OSTI ID:
6858926
Journal Information:
Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 75:10; ISSN 0002-7820; ISSN JACTAW
Country of Publication:
United States
Language:
English