Synthesis of highly oriented lead zirconate-lead titanate film using metallo-organics
Journal Article
·
· Journal of the American Ceramic Society; (United States)
- Dept. of Applied Chemistry, School of Engineering, Nagoya Univ., Nagoya 464 (Japan)
This paper reports on crack-free Pb(Zr,Ti)O[sub 3] (PZT) thin films with preferred orientation that were prepared successfully on MgO (100), SrTiO[sub 3] (100), and Pt/Ti/SiO[sub 2]/Si substrates from metal alkoxide solutions. Calcination of precursor films in a H[sub 2]O[minus] O[sub 2] gas mixture was found to be effective not only for low-temperature crystallization of perovskite PZT, but also for obtaining the preferred orientation of PZT films. Single-phase PZT films with high preferred orientation were synthesized on MgO (100) and Pt/Ti/SiO[sub 2]/Si substrates at 550[degrees] and 600[degrees] C for 2 h, respectively. The PZT film on the Pt/Ti/Si-O[sub 2]/Si substrate showed a permittivity of 520, tan [delta] of 0.03, a remanent polarization of 24 [mu]C/cm[sup 2], and a coercive field of 54 kV/cm.
- OSTI ID:
- 6858926
- Journal Information:
- Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 75:10; ISSN 0002-7820; ISSN JACTAW
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
COERCIVE FORCE
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
LEAD COMPOUNDS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
METALS
OXIDES
OXYGEN COMPOUNDS
PERMITTIVITY
PHYSICAL PROPERTIES
PLATINUM
PLATINUM METALS
POLARIZABILITY
PRECURSOR
PZT
SEMIMETALS
SILICON
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SYNTHESIS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
ZIRCONATES
ZIRCONIUM COMPOUNDS
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
COERCIVE FORCE
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
LEAD COMPOUNDS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
METALS
OXIDES
OXYGEN COMPOUNDS
PERMITTIVITY
PHYSICAL PROPERTIES
PLATINUM
PLATINUM METALS
POLARIZABILITY
PRECURSOR
PZT
SEMIMETALS
SILICON
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SYNTHESIS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
ZIRCONATES
ZIRCONIUM COMPOUNDS