Use of transmission electron microscopy for the characterization of rapid thermally annealed, solution-gel, lead zirconate titanate films

Journal Article · Sun May 01 04:00:00 EDT 1994 · Journal of the American Ceramic Society; (United States)

DOI:https://doi.org/10.1111/j.1151-2916.1994.tb05394.x· OSTI ID:7114807

Reaney, I M; Brooks, K; Klissurska, R; Pawlaczyk, C; Setter, N ^[1]

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1. Ecole Polytechnique Federale de Lausanne (Switzerland). Dept. des Materiaux

The microstructure and preferred orientations of rapid thermally annealed Pb(Zr[sub 0.5],Ti[sub 0.47])O[sub 3] films, deposited on Pt/Ti/SiO[sub 2]/Si electrode/substrates by solution-gel spinning, have been investigated using analytical and high-resolution electron microscopy and X-ray diffraction. The temperature of pyrolysis of the PZT films was found to influence the preferred orientation of the film: lower temperatures (350 C) favored a (111) orientation, whereas higher temperatures (420 C) favored a (100) orientation. Excess Pb was used to control the A-site stoichiometry of the film particularly at the film surface where Pb-deficient crystals could often be observed. The absence of these crystals was shown to be correlated with an improvement in the dielectric response.

• OSTI ID: 7114807
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 77:5; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
CHALCOGENIDES
DATA
ELEMENTS
EXPERIMENTAL DATA
GRAIN ORIENTATION
INFORMATION
LEAD COMPOUNDS
METALS
MICROSTRUCTURE
NUMERICAL DATA
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
PLATINUM
PLATINUM METALS
PZT
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SUBSTRATES
TITANATES
TITANIUM
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
ZIRCONATES
ZIRCONIUM COMPOUNDS