Ionization chamber dosimeter
Patent
·
OSTI ID:6914930
This patent describes a method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5061216; A
- Application Number:
- PPN: US 7-509121
- OSTI ID:
- 6914930
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
440102* -- Radiation Instrumentation-- Radiation Dosemeters
440200 -- Radiation Effects on Instrument Components
Instruments
or Electronic Systems
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
APERTURES
DOSEMETERS
DOSES
ESTERS
ETCHING
FABRICATION
FILMS
HARDENING
IONIZATION CHAMBERS
MATERIALS
MEASURING INSTRUMENTS
MYLAR
OPENINGS
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHYSICAL RADIATION EFFECTS
PLASTICS
POLYESTERS
POLYMERS
RADIATION DETECTORS
RADIATION DOSES
RADIATION EFFECTS
RADIATION HARDENING
SURFACE FINISHING
SURFACES
SYNTHETIC MATERIALS
THIN FILMS
440200 -- Radiation Effects on Instrument Components
Instruments
or Electronic Systems
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
APERTURES
DOSEMETERS
DOSES
ESTERS
ETCHING
FABRICATION
FILMS
HARDENING
IONIZATION CHAMBERS
MATERIALS
MEASURING INSTRUMENTS
MYLAR
OPENINGS
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHYSICAL RADIATION EFFECTS
PLASTICS
POLYESTERS
POLYMERS
RADIATION DETECTORS
RADIATION DOSES
RADIATION EFFECTS
RADIATION HARDENING
SURFACE FINISHING
SURFACES
SYNTHETIC MATERIALS
THIN FILMS