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U.S. Department of Energy
Office of Scientific and Technical Information

Ionization chamber dosimeter

Patent ·
OSTI ID:6914930

This patent describes a method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.

Assignee:
Dept. of Energy, Washington, DC (United States)
Patent Number(s):
US 5061216; A
Application Number:
PPN: US 7-509121
OSTI ID:
6914930
Country of Publication:
United States
Language:
English