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Excimer laser-processed oxide-passivated silicon solar cells of 19. 5-percent efficiency

Journal Article · · IEEE Electron Device Lett.; (United States)
Single-crystal p/sup +/ -n-n/sup +/ silicon solar cells with AM1.5 efficiencies exceeding 19.5 percent have been fabricated using glow-discharge implantation and pulsed excimer laser annealing, together with techniques for reducing the recombination current. These techniques include intrinsic passivation by thermal oxide growth and fine-line photolithography for metallization in order to reduce the area of metal-silicon contact. These are the highest efficiency ion-implanted nonconcentrator cells reported to date and to our knowledge they are the highest efficiency p-on-n cells made by any technique.
Research Organization:
Solid State Div., Oak Ridge National Lab., Oak Ridge, TN (US)
OSTI ID:
6833345
Journal Information:
IEEE Electron Device Lett.; (United States), Journal Name: IEEE Electron Device Lett.; (United States) Vol. EDL-8:5; ISSN EDLED
Country of Publication:
United States
Language:
English