Beam processing for high-efficiency Si solar cells
Conference
·
OSTI ID:5612939
High-efficiency silicon solar cells have been made using two different techniques for dopant implantation and two types of lasers for annealing of the implantation damage. Regardless of the type of lasers used for the annealing, a 1-KeV glow discharge BF/sub 3/ implantation gave higher-efficienty solar cells than conventional mass-analyzed 5 kV /sup 11/B implantation. The implanted layers were annealed with XeCl excimer and ruby lasers. Excimer laser annealing was found to give superior results. Spectral-response measurements showed that the higher efficiencies were the result of an improved blue response. The use of glow discharge BF/sub 3/ implantation and excimer laser annealing resulted in P/sup +/n cells with AM1 efficiencies greater than 16.5%, as measured at the Solar Energy Research Institute.
- Research Organization:
- Oak Ridge National Lab., TN (USA); Helionetics, Inc., Oak Ridge, TN (USA). Laser Processing Lab.; Helionetics, Inc., San Diego, CA (USA). Laser Div.
- DOE Contract Number:
- W-7405-ENG-26
- OSTI ID:
- 5612939
- Report Number(s):
- CONF-831028-4; ON: DE84002059
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
BORON
CARRIER DENSITY
CHLORIDES
CHLORINE COMPOUNDS
CURRENTS
DATA
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
FILL FACTORS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
HEATING
INFORMATION
ION IMPLANTATION
LASER-RADIATION HEATING
LASERS
NUMERICAL DATA
PERFORMANCE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLASMA HEATING
QUANTUM EFFICIENCY
RARE GAS COMPOUNDS
RUBY LASERS
SEMIMETALS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS
SPECTRAL RESPONSE
XENON CHLORIDES
XENON COMPOUNDS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
BORON
CARRIER DENSITY
CHLORIDES
CHLORINE COMPOUNDS
CURRENTS
DATA
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
FILL FACTORS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
HEATING
INFORMATION
ION IMPLANTATION
LASER-RADIATION HEATING
LASERS
NUMERICAL DATA
PERFORMANCE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLASMA HEATING
QUANTUM EFFICIENCY
RARE GAS COMPOUNDS
RUBY LASERS
SEMIMETALS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS
SPECTRAL RESPONSE
XENON CHLORIDES
XENON COMPOUNDS