Effect of pulse duration on the annealing of ion implanted silicon with a XeCl excimer laser and solar cells
Journal Article
·
· Mater. Res. Soc. Symp. Proc.; (United States)
OSTI ID:6596377
The advantage of pulsed excimer lasers for semiconductor processing are reviewed. Studies of XeCl excimer laser annealing with pulses of 25 and 70 nsec duration and energy densities in the range from 0.5-3.0 J/cm/sup 2/ are discussed. The annealing characteristics are described in terms of the results of melt depth, dopant profile spreading, and electrical properties (sheet resistivity, diode characteristics) measurements. Solar cells with efficiencies as high as 16.7% Am1 have been fabricated using glow discharge implantation and XeCl laser annealing.
- Research Organization:
- Oak Ridge National Lab., TN
- DOE Contract Number:
- W-7405-ENG-26
- OSTI ID:
- 6596377
- Journal Information:
- Mater. Res. Soc. Symp. Proc.; (United States), Journal Name: Mater. Res. Soc. Symp. Proc.; (United States) Vol. 13; ISSN MRSPD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ANNEALING
CHLORIDES
CHLORINE COMPOUNDS
DIRECT ENERGY CONVERTERS
ELECTROMAGNETIC RADIATION
ELEMENTS
EQUIPMENT
FABRICATION
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
ION IMPLANTATION
IRRADIATION
LASER RADIATION
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PULSED IRRADIATION
RADIATIONS
RARE GAS COMPOUNDS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
XENON CHLORIDES
XENON COMPOUNDS
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ANNEALING
CHLORIDES
CHLORINE COMPOUNDS
DIRECT ENERGY CONVERTERS
ELECTROMAGNETIC RADIATION
ELEMENTS
EQUIPMENT
FABRICATION
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
ION IMPLANTATION
IRRADIATION
LASER RADIATION
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PULSED IRRADIATION
RADIATIONS
RARE GAS COMPOUNDS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
XENON CHLORIDES
XENON COMPOUNDS