Pulsed excimer laser annealing of ion implanted silicon: Characterization and solar cell fabrication

Journal Article · Mon Nov 15 04:00:00 EST 1982 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.93342· OSTI ID:7048972

Lowndes, D H; Cleland, J W; Christie, W H; Eby, R E; Jellison, Jr, G E; Narayan, J; Westbrook, R D; Wood, R F; Nilson, J A; Dass, S C

A pulsed ultraviolet excimer laser (XeCl, 308-nm wavelength, approx.41-ns pulse duration) has been sucessfully used for laser annealing of both boron- and arsenic-implanted silicon, and for formation of high quality p-n junctions. Transmission electron microscopy, secondary ion mass spectroscopy, and sheet electrical properties measurements are used to characterize ion implanted and XeCl laser annealed specimens. Predictions of thermal melting model calculations of the annealing process are also compared with results of these measurements. Finally, we demonstrate the first use of high repetition rate, scanned, overlapping excimer laser pulses to fabricate large area photovoltaic solar cells with good performance characteristics.

• Research Organization: Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
• DOE Contract Number: W-7405-ENG-26
• OSTI ID: 7048972
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 41:10; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
ARSENIC IONS
BORON IONS
CHARGED PARTICLES
CHLORIDES
CHLORINE COMPOUNDS
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
EQUIPMENT
FABRICATION
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
HEATING
ION IMPLANTATION
IONS
LASER-RADIATION HEATING
LASERS
MATHEMATICAL MODELS
MELTING
MICROSCOPY
PERFORMANCE
PHASE TRANSFORMATIONS
PHOTOELECTRIC CELLS
PHOTOELECTROMAGNETIC EFFECTS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC EFFECT
PHYSICAL PROPERTIES
PLASMA HEATING
PULSES
RADIATIONS
RARE GAS COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
TRANSMISSION ELECTRON MICROSCOPY
ULTRAVIOLET RADIATION
XENON CHLORIDES
XENON COMPOUNDS