Laser spectroscopy and gas-phase chemistry in CVD

Conference · Thu Sep 15 00:00:00 EDT 1988 · AIP Conf. Proc.; (United States)

OSTI ID:6825970

Ho, P; Coltrin, M E; Breiland, W G

A coordinated program of experimental and theoretical research into the fundamental mechanisms of CVD is described. The experimental part of the program involves the use of laser spectroscopic techniques for in situ measurements during CVD. The theoretical part of the program consists of a computer model that contains a detailed description of the coupled fluid mechanics and gas-phase chemical kinetics for silane CVD.

• Research Organization: Sandia National Laboratories, Div. 1126, Albuquerque, NM 87185-5800
• OSTI ID: 6825970
• Report Number(s): CONF-8711124-
• Journal Information: AIP Conf. Proc.; (United States), Journal Name: AIP Conf. Proc.; (United States) Vol. 167:1; ISSN APCPC
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102 -- Chemical & Spectral Procedures
656002* -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COATING
CHEMICAL REACTION KINETICS
CHEMICAL VAPOR DEPOSITION
COMPUTERIZED SIMULATION
COORDINATED RESEARCH PROGRAMS
DEPOSITION
FLUID MECHANICS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
LASER SPECTROSCOPY
MECHANICS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
RESEARCH PROGRAMS
SILANES
SILICON COMPOUNDS
SIMULATION
SPECTROSCOPY
SURFACE COATING