Laser spectroscopy and gas-phase chemistry in CVD

Conference · Wed Dec 31 23:00:00 EST 1986

OSTI ID:6170666

Ho, P; Coltrin, M E; Beiland, W G

A coordinated program of experimental and theoretical research into the fundamental mechanisms of CVD is described. The experimental part of the program involves the use of laser spectroscopic techniques for in situ measurements during CVD. The theoretical part of the program consists of a computer model that contains a detailed description of the coupled fluid mechanics and gas-phase chemical kinetics for silane CVD. 8 refs.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6170666
• Report Number(s): SAND-87-2320C; CONF-871125-2; ON: DE87013715
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
656000* -- Condensed Matter Physics
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
LASER SPECTROSCOPY
MATHEMATICAL MODELS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
RAMAN SPECTROSCOPY
RESEARCH PROGRAMS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SPECTROSCOPY
SURFACE COATING
SURFACES