Laser spectroscopy and gas-phase chemistry in CVD
Conference
·
OSTI ID:6852687
The experimental work involves the use of laser spectroscopic techniques for in situ measurements on the gas phase in a chemical vapor deposition reactor. The theoretical part of the program consists of a computer model of the coupled fluid mechanics and gas-phase chemical kinetics of silane decomposition and subsequent reactions of intermediate species. The laser measurements provide extensive data for thoroughly testing the predictive capabilities of the model.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6852687
- Report Number(s):
- SAND-86-0440C; CONF-870304-1; ON: DE86007392
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
CHEMICAL REACTION KINETICS
CHEMICAL REACTORS
FILMS
GAS ANALYSIS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
LASER SPECTROSCOPY
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SILANES
SILICON COMPOUNDS
SPECTROSCOPY
THIN FILMS
47 OTHER INSTRUMENTATION
CHEMICAL REACTION KINETICS
CHEMICAL REACTORS
FILMS
GAS ANALYSIS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
LASER SPECTROSCOPY
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SILANES
SILICON COMPOUNDS
SPECTROSCOPY
THIN FILMS