Interfacial reactions of off-stoichiometric YBaCuO films on MgO and Si substrates
Journal Article
·
· Journal of the Electrochemical Society; (USA)
- Waseda Univ., Tokyo (Japan). School of Science and Engineering
- Tokyo Denki Univ. (Japan)
YBaCuO films were deposited on Si and MgO substrates by RF sputtering in Ar + O{sub 2} ambient. Composition in the film is quite different from that of the target. Interfacial reactions between the film and Si or MgO substrates has been investigated by Rutherford backscattering spectroscopy. After the annealing at 800{degrees}-900{degrees}C, it has been confirmed that Cu atoms diffuse into the substrate. However, by depositing a Cu interfacial layer between YBaCuO film and the substrate, Cu diffusion is suppressed and the stoichiometric superconducting phase of Y:Ba:Cu = 1:2:3 is formed.
- OSTI ID:
- 6815480
- Journal Information:
- Journal of the Electrochemical Society; (USA), Journal Name: Journal of the Electrochemical Society; (USA) Vol. 137:1; ISSN JESOA; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- English
Similar Records
Interdiffusion and interfacial reaction between an YBa/sub 2/Cu/sub 3/O/sub x/ thin film and substrates
Characterization of YBaCuO and ErBaCuO thin films deposited on silicon and gallium arsenide substrates
Preparation and properties of in-situ YBaCuO films on Si substrates with buffer layers
Journal Article
·
Mon Oct 10 00:00:00 EDT 1988
· Appl. Phys. Lett.; (United States)
·
OSTI ID:6782286
Characterization of YBaCuO and ErBaCuO thin films deposited on silicon and gallium arsenide substrates
Conference
·
Tue Feb 28 23:00:00 EST 1989
· IEEE Trans. Magn.; (United States)
·
OSTI ID:6091767
Preparation and properties of in-situ YBaCuO films on Si substrates with buffer layers
Conference
·
Thu Feb 28 23:00:00 EST 1991
· IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)
·
OSTI ID:5932346
Related Subjects
36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
426001 -- Engineering-- Superconducting Devices & Circuits-- (1990-)
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ARGON IONS
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
COPPER
COPPER COMPOUNDS
COPPER OXIDES
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
INTERFACES
IONS
METALS
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
PHYSICAL PROPERTIES
RF SYSTEMS
SCATTERING
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
426001 -- Engineering-- Superconducting Devices & Circuits-- (1990-)
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ARGON IONS
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
COPPER
COPPER COMPOUNDS
COPPER OXIDES
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
INTERFACES
IONS
METALS
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
PHYSICAL PROPERTIES
RF SYSTEMS
SCATTERING
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES