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Characterization of YBaCuO and ErBaCuO thin films deposited on silicon and gallium arsenide substrates

Conference · · IEEE Trans. Magn.; (United States)
OSTI ID:6091767
; ; ; ; ; ;
YBaCuO and ErBaCuO films have been deposited on Si substrates with and without a ZrO/sub 2/ buffer layer and on GaAs substrates by RF diode sputtering from stoichiometric oxide targets. The films and interface between the films and semiconductor substrates are analyzed by Rutherford backscattering spectrometry (RBS), X-ray fluorescence spectroscopy (XRF), Auger electron spectroscopy (AES), energy dispersive X-ray spectrometry (EDAX), and scanning electron microscopy (SEM). The films grown on Si substrates with a ZrO/sub 2/ buffer layer show superconductivity above 65 K and no significant interaction at the interface is observed. High-T/sub c/ films can be obtained either by slow furnace annealing or by rapid heat-pulse annealing. No significant interaction is observed between YBaCuO (ErBaCuO) and GaAs after rapid thermal annealing at temperatures below 750/sup 0/C.
Research Organization:
Dept. of Electrical Engineering and Computer Science and the Electronics Research Lab., Univ. of California, Berkeley, CA (US); Materials and Chemical Sciences Div., Lawrence Berkeley Lab., Univ. of California, Berkeley, CA (US); Physical Electronics Div., Perkin-Elmer Corp., Mountain View, CA (US); Solid State Research Lab., Tektronix Inc., Beaverton, OR (US)
OSTI ID:
6091767
Report Number(s):
CONF-880812-
Conference Information:
Journal Name: IEEE Trans. Magn.; (United States) Journal Volume: 25:2
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
ARSENIC COMPOUNDS
ARSENIDES
AUGER ELECTRON SPECTROSCOPY
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL ANALYSIS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
ERBIUM COMPOUNDS
ERBIUM OXIDES
FABRICATION
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HEAT TREATMENTS
HIGH TEMPERATURE
MICROSCOPY
NONDESTRUCTIVE ANALYSIS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
RARE EARTH COMPOUNDS
RF SYSTEMS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMIMETALS
SILICON
SPECTROSCOPY
SPUTTERING
STOICHIOMETRY
SUBSTRATES
SUPERCONDUCTING FILMS
TRANSITION ELEMENT COMPOUNDS
X-RAY EMISSION ANALYSIS
X-RAY FLUORESCENCE ANALYSIS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES