Preparation and properties of in-situ YBaCuO films on Si substrates with buffer layers
- Virginia Univ., Charlottesville, VA (United States). Dept. of Physics
This paper reports on high T{sub c} YBaCuO superconducting films prepared in-situ on Si substrates with buffer layers using off-axis single-target RF magnetron sputtering. A special cylinder heater with a reflecting cone was used to grow in-situ YBaCuO films on different buffer layers, such as Y-stabilized ZrO{sub 2}(YSZ), LaAlO{sub 3}, LaGaO{sub 3}, NdAlO{sub 3}, NdGaO{sub 3}, SrTiO{sub 3}, and MgO. The YBaCuO films on YSZ and LaAlO{sub 3} buffer layers have T{sub c}(zero) of 84 K and 83 K respectively. Films deposited at substrate temperatures above 650{degrees} C have preferential orientation with c-axis perpendicular to the film surface. The films also show excellent surface smoothness up to atomic scale with a roughness of 5{Angstrom}.
- OSTI ID:
- 5932346
- Report Number(s):
- CONF-900944--
- Journal Information:
- IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Vol. 27:2; ISSN IEMGA; ISSN 0018-9464
- Country of Publication:
- United States
- Language:
- English
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ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
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