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Interfacial properties of indium tin oxide/indium phosphide devices

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.93656· OSTI ID:6812376

Efficient indium tin oxide (ITO)/p-InP solar cells have been fabricated by ion beam deposition. In this letter, a critical evaluation of the ITO/InP interface is presented using complementary capacitance-voltage and ion microprobe measurements. We have found that deposition of ITO produces a semi-insulating region at the InP surface. This high resistivity layer extends about 750 A into the bulk. We have evidence that this region is due to surface accumulation of compensating impurities.

Research Organization:
Solar Energy Research Institute, Photovoltaic Devices and Measurements Branch, 1617 Cole Boulevard, Golden, Colorado 80401
OSTI ID:
6812376
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 41:8; ISSN APPLA
Country of Publication:
United States
Language:
English