Solid-phase epitaxy of Ti-implanted LiNbO/sub 3/. [Ti in LiNbO/sub 3/]
Conference
·
OSTI ID:6805291
The implantation of Ti into LiNbO/sub 3/ has been studied as a means of altering the optical index of refraction to produce optical waveguides. Implanting 2 x 10/sup 17/ atoms/cm/sup 2/ of 360-keV Ti at liquid nitrogen temperature produces a highly damaged region extending to a depth of about 4000 A. Solid-phase epitaxial regrowth of the LiNbO/sub 3/ can be achieved by annealing in a water-saturated oxygen atmosphere at 400/sup 0/C, though complete removal of the residual damage usually requires temperatures in excess of 800/sup 0/C. The solid-phase epitaxial regrowth rate exhibits an activation energy of 2 eV at doses below 3 x 10/sup 16/ Ti/cm/sup 2/, but both the regrowth rate and activation energy decrease at higher doses. At doses above 1 x 10/sup 17/ Ti/cm/sup 2/, the solid-phase epitaxial regrowth occurs only at temperatures above 800/sup 0/C.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6805291
- Report Number(s):
- CONF-870438-14; ON: DE87009683
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALI METAL COMPOUNDS
CRYSTAL GROWTH METHODS
DOPED MATERIALS
ELEMENTS
ION IMPLANTATION
LITHIUM COMPOUNDS
MATERIALS
METALS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
REFRACTIVITY
TITANIUM
TRANSITION ELEMENTS
360601* -- Other Materials-- Preparation & Manufacture
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALI METAL COMPOUNDS
CRYSTAL GROWTH METHODS
DOPED MATERIALS
ELEMENTS
ION IMPLANTATION
LITHIUM COMPOUNDS
MATERIALS
METALS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
REFRACTIVITY
TITANIUM
TRANSITION ELEMENTS