Optical waveguide formation by ion implantation of Ti or Ag

Conference · Tue Dec 01 04:00:00 EST 1987

OSTI ID:5620205

Poker, D B; Thomas, D K

Ion implantation of Ti into LiNbO/sub 3/ has been shown to be an effective means of producing optical waveguides, while maintaining better control over the resulting concentration profile of the dopant than can be achieved by in-diffusion. While undoped, amorphous LiNbO/sub 3/ can be regrown by solid-phase epitaxy at 400/sup 0/C with a regrowth velocity of 250 A/min, the higher concentrations of Ti required to form a waveguide (approx.10%) slow the regrowth considerably, so that temperatures approaching 800/sup 0/C are used. Complete removal of residual damage requires annealing temperatures of 1000/sup 0/C, not significantly lower than those used with in-diffusion. Solid phase epitaxy of Ag-implanted LiNbO/sub 3/, however, occurs at much lower temperatures. The regrowth is completed at 400/sup 0/C, and annealing of all residual damage occurs at or below 800/sup 0/C. Furthermore, the regrowth rate is independent of Ag concentration up to the highest dose implanted to date, 1 x 10/sup 17/ Ag/cm/sup 2/. The usefulness of Ag implantation for the formation of optical waveguides is limited, however, by the higher mobility of Ag at the annealing temperature, compared to Ti. 7 refs., 4 figs.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5620205
• Report Number(s): CONF-8711126-1; ON: DE88004595
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
42 ENGINEERING
420200 -- Engineering-- Facilities
Equipment
& Techniques
ALKALI METAL COMPOUNDS
ANNEALING
CHARGED PARTICLES
COATINGS
COMPARATIVE EVALUATIONS
CRYSTAL DOPING
CRYSTAL GROWTH
CRYSTALLIZATION
DIAGRAMS
DOPED MATERIALS
EPITAXY
EQUIPMENT
EVEN-EVEN NUCLEI
HEAT TREATMENTS
INTERMEDIATE MASS NUCLEI
INTERNAL CONVERSION RADIOISOTOPES
ION IMPLANTATION
IONS
ISOMERIC TRANSITION ISOTOPES
ISOTOPES
LITHIUM COMPOUNDS
MATERIALS
NIOBATES
NIOBIUM COMPOUNDS
NUCLEI
ODD-EVEN NUCLEI
OPTICAL EQUIPMENT
OPTICAL SYSTEMS
OXYGEN COMPOUNDS
PHASE DIAGRAMS
PHASE TRANSFORMATIONS
PRODUCTION
RADIOISOTOPES
REFRACTORY METAL COMPOUNDS
SECONDS LIVING RADIOISOTOPES
SILVER 107
SILVER IONS
SILVER ISOTOPES
STABLE ISOTOPES
STOICHIOMETRY
TITANIUM 48
TITANIUM IONS
TITANIUM ISOTOPES
TRANSITION ELEMENT COMPOUNDS
WAVEGUIDES