Solid-phase epitaxy of ion-implanted LiNbO/sub 3/ for optical waveguide fabrication

Journal Article · Sun Mar 01 00:00:00 EST 1987 · J. Mat. Res.; (United States)

OSTI ID:6737368

Buchal, C; Ashley, P R; Appleton, B R

A new technique for successfully fabricating high-quality optical waveguides in LiNbO/sub 3/ is reported. A high concentration of Ti is implanted with the substrate at liquid nitrogen temperature and an amorphous, Ti-rich, nonequilibrium phase is produced in the implanted, near-surface region. Subsequent thermal annealing in water-saturated oxygen atmosphere at up to 1000 /sup 0/C initiates solid-phase epitaxial regrowth onto the crystalline substrate. A high-quality single crystalline layer results that is rich in Ti and has excellent waveguiding properties.

• Research Organization: Oak Ridge National Laboratory, Solid State Division, Oak Ridge, Tennessee 37831
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6737368
• Journal Information: J. Mat. Res.; (United States), Vol. 2:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
LITHIUM COMPOUNDS
ION IMPLANTATION
RECRYSTALLIZATION
TITANIUM IONS
DIFFUSION
WAVEGUIDES
FABRICATION
ANNEALING
EPITAXY
LAYERS
NIOBATES
ALKALI METAL COMPOUNDS
CHARGED PARTICLES
HEAT TREATMENTS
IONS
NIOBIUM COMPOUNDS
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360601* - Other Materials- Preparation & Manufacture