Development of boron liquid--metal--ion source
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
A boron liquid--metal--ion source is described that uses a combination of a glassy carbon or carbide emitter and a Ni--B base alloy as its source material. The B/sup +/ ion emission current is 25%--35% of the total emission current, and the energy spread for B/sup +/ ions is 12 eV at a total current of 30 ..mu..A. A source lifetime of more than 250 h was achieved with a total current of 30--50 ..mu..A. This source mounted on a mass-separated focusing column has led to B/sup +/ submicron beams with maximum energies of 20 keV for preliminary experiments on maskless implantation.
- Research Organization:
- Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan
- OSTI ID:
- 6795383
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 2:3; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
BEAM PRODUCTION
BEAMS
BORON
BORON 11 BEAMS
BORON ALLOYS
BORON IONS
CARBIDES
CARBON
CARBON COMPOUNDS
CHARGED PARTICLES
ELEMENTS
ENERGY RANGE
FABRICATION
FLUIDS
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
KEV RANGE
KEV RANGE 10-100
LIQUID METALS
LIQUIDS
MASKING
METALS
NICKEL ALLOYS
NONMETALS
SEMIMETALS
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
BEAM PRODUCTION
BEAMS
BORON
BORON 11 BEAMS
BORON ALLOYS
BORON IONS
CARBIDES
CARBON
CARBON COMPOUNDS
CHARGED PARTICLES
ELEMENTS
ENERGY RANGE
FABRICATION
FLUIDS
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
KEV RANGE
KEV RANGE 10-100
LIQUID METALS
LIQUIDS
MASKING
METALS
NICKEL ALLOYS
NONMETALS
SEMIMETALS