Movable needle type of liquid-metal-ion sources for boron and phosphorus ions
A movable needle type of liquid-metal-ion source (LMIS) has been developed for boron (B) and phosphorus (P) ions. The needle movement is very effective for accomplishing good wetting between the needle and the molten metal as well as for balancing the ion emission and inflow of the source metal at the needle apex. These features lead to stable ion emission under a wide range of experimental conditions. The B-LMIS using a combination of carbon or carbide needle and Ni--B--Si alloy emits stable B ions with an atomic fraction of 25% to 35%. The P-LMIS using Pt--P--Sb alloy provides a large amount of P and P atomic fractions (15%--30%) with a P /P ratio of 0.5 to 2. The experimental results on energy spread per unit charge, E(M/sup n/ )/n, agree with the general relationship ( E(M )/2less than or equal to E(M )< E(M )). The source lifetime is more than 250 and 150 h for the B- and P-LMIS's, respectively. These LMIS's have the capability of providing stable B and P focused-ion-beams (FIB's) by mounting them on an FIB apparatus.
- Research Organization:
- Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan
- OSTI ID:
- 6288583
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:5; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ANTIMONY ALLOYS
BEAM PRODUCTION
BORON ALLOYS
BORON IONS
CHARGED PARTICLES
ENERGY SPECTRA
FABRICATION
ION EMISSION
ION SOURCES
IONS
NICKEL ALLOYS
PHOSPHORUS COMPOUNDS
PHOSPHORUS IONS
PLATINUM ALLOYS
PLATINUM METAL ALLOYS
PNICTIDES
SILICON ALLOYS
SPECTRA