Long-lifetime, reliable liquid metal ion sources for boron, arsenic, and phosphorus
Journal Article
·
· J. Vac. Sci. Technol., B; (United States)
Operation of liquid--metal ion sources based on palladium alloys that contain boron, arsenic, and phosphorus (singly or in combination) was studied. These sources, when run on refractory metal needles and heater ribbons, have exhibited high angular intensity (1.5--5 ..mu..A/sr), long lifetime (>150 h), low energy spread (<15 eV), and stable operation with extracted currents down to 2 ..mu..A.
- Research Organization:
- Hughes Research Laboratories, Malibu, California 90265
- OSTI ID:
- 6772725
- Journal Information:
- J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 5:1; ISSN JVTBD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ARSENIC IONS
BEAM CURRENTS
BEAM PRODUCTION
BEAMS
BORON 11 BEAMS
BORON IONS
CHARGED PARTICLES
CURRENTS
DATA
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FLUIDS
FOCUSING
INFORMATION
ION BEAMS
ION SOURCES
IONS
ISOTOPES
LIFETIME
LIGHT NUCLEI
LIQUID METALS
LIQUIDS
METALS
NUCLEI
NUMERICAL DATA
ODD-EVEN NUCLEI
OPERATION
PALLADIUM ALLOYS
PHOSPHORUS 31
PHOSPHORUS 31 BEAMS
PHOSPHORUS IONS
PHOSPHORUS ISOTOPES
PLATINUM METAL ALLOYS
RELIABILITY
STABLE ISOTOPES
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ARSENIC IONS
BEAM CURRENTS
BEAM PRODUCTION
BEAMS
BORON 11 BEAMS
BORON IONS
CHARGED PARTICLES
CURRENTS
DATA
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FLUIDS
FOCUSING
INFORMATION
ION BEAMS
ION SOURCES
IONS
ISOTOPES
LIFETIME
LIGHT NUCLEI
LIQUID METALS
LIQUIDS
METALS
NUCLEI
NUMERICAL DATA
ODD-EVEN NUCLEI
OPERATION
PALLADIUM ALLOYS
PHOSPHORUS 31
PHOSPHORUS 31 BEAMS
PHOSPHORUS IONS
PHOSPHORUS ISOTOPES
PLATINUM METAL ALLOYS
RELIABILITY
STABLE ISOTOPES