Long-lifetime, reliable liquid metal ion sources for boron, arsenic, and phosphorus

Journal Article · Thu Jan 01 00:00:00 EST 1987 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.583862· OSTI ID:6772725

Clark, Jr, W M; Seliger, R L; Utlaut, M W; Bell, A E; Swanson, L W; Schwind, G A; Jergenson, J B

Operation of liquid--metal ion sources based on palladium alloys that contain boron, arsenic, and phosphorus (singly or in combination) was studied. These sources, when run on refractory metal needles and heater ribbons, have exhibited high angular intensity (1.5--5 ..mu..A/sr), long lifetime (>150 h), low energy spread (<15 eV), and stable operation with extracted currents down to 2 ..mu..A.

• Research Organization: Hughes Research Laboratories, Malibu, California 90265
• OSTI ID: 6772725
• Journal Information: J. Vac. Sci. Technol., B; (United States), Vol. 5:1
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARSENIC IONS
BEAM CURRENTS
BEAM PRODUCTION
BORON 11 BEAMS
ION SOURCES
FABRICATION
LIFETIME
OPERATION
PHOSPHORUS 31 BEAMS
BORON IONS
EXPERIMENTAL DATA
FOCUSING
ION BEAMS
LIQUID METALS
PALLADIUM ALLOYS
PHOSPHORUS 31
PHOSPHORUS IONS
RELIABILITY
ALLOYS
BEAMS
CHARGED PARTICLES
CURRENTS
DATA
ELEMENTS
FLUIDS
INFORMATION
IONS
ISOTOPES
LIGHT NUCLEI
LIQUIDS
METALS
NUCLEI
NUMERICAL DATA
ODD-EVEN NUCLEI
PHOSPHORUS ISOTOPES
PLATINUM METAL ALLOYS
STABLE ISOTOPES
640301* - Atomic
Molecular &amp; Chemical Physics- Beams &amp; their Reactions