Development of boron and phosphorus liquid metal ion sources for the focused ion beam system

Thesis/Dissertation · Wed Jan 01 04:00:00 EST 1986

OSTI ID:6708715

Higuchi-Rusli, R

The approach taken here was to develop and build dual carbon filament liquid metal ion sources along with the test bed system. Pd/sub 73/B/sub 27/ and Pt/sub 58/B/sub 42/ binary alloys were selected as p-type dopant sources, and Cu/sub 3/P binary alloy was used as n-type dopant source. Three emitters with different tip radii were used in the present investigation. The results indicate that Pd/sub 73/B/sub 27/ alloy is a good candidate for a boron liquid metal ion source. This conclusion was derived in this investigation from a lifetime test result with 2.5 ..mu..m emitter of more than 120 hours. Pt/sub 58/B/sub 42/ alloy is not a suitable alloy source for a boron liquid metal ion source despite the higher mole fraction of boron to be used as a source of ionizing species. Cu/sub 3/P alloy is a good candidate for a phosphorus liquid metal ion source. Any apparent chemical interactions were found by metallographic technique, although AES result shows emitter element in the spectrum of collected beam current. A combination of rhenium and graphite ribbon as liquid metal ion source emitter and heater used in this investigation is the only possible approach to produce a long lifetime boron and phosphorus liquid metal ion source.

• Research Organization: Rensselaer Polytechnic Inst., Troy, NY (USA)
• OSTI ID: 6708715
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
43 PARTICLE ACCELERATORS
430301* -- Particle Accelerators-- Ion Sources
ALLOYS
BORON ALLOYS
CARBON
COPPER COMPOUNDS
COPPER PHOSPHIDES
ELEMENTS
FILAMENTS
FLUIDS
ION SOURCES
LIQUID METALS
LIQUIDS
METALS
NONMETALS
PALLADIUM ALLOYS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PLATINUM ALLOYS
PLATINUM METAL ALLOYS
PNICTIDES
THERMIONIC EMITTERS
TRANSITION ELEMENT COMPOUNDS