Preferential sputtering of brass studied by AES and XPS

Journal Article · Sun Apr 01 04:00:00 EST 1984 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572688· OSTI ID:6761825

Hammer, G E; Shemenski, R M

Preferential sputtering of brass has been investigated for inert gas ion bombardment having incident ion energies between 500 and 4000 eV. Enrichment of the copper on surfaces sputtered to equilibrium was found for all conditions, and was observed to increase with ion energy and mass. Copper concentrations calculated by using Auger electron spectroscopy (AES) peak-to-peak heights in the E dN/dE mode varied from 8% to 13% above bulk composition. This variation was found to be reversible upon changing the incident ion energy and sputtering away the existing damaged layer. Analysis by x-ray photoelectron spectroscopy (XPS) using 2p and 3p peak areas and escape depths showed the existence of a subsurface region with greater enrichment of copper than that produced on the sputtered surface.

• Research Organization: Goodyear Tire and Rubber Company, Akron, Ohio 44316
• OSTI ID: 6761825
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 2:2; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ARGON IONS
AUGER ELECTRON SPECTROSCOPY
BEAMS
BRASS
CHARGED PARTICLES
CHEMICAL COMPOSITION
COLLISIONS
COPPER
COPPER ALLOYS
COPPER BASE ALLOYS
ELECTROMAGNETIC RADIATION
ELECTRON BEAMS
ELECTRON COLLISIONS
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY RANGE
ENERGY SPECTRA
EV RANGE
EV RANGE 100-1000
ION COLLISIONS
IONIZING RADIATIONS
IONS
KEV RANGE
KEV RANGE 01-10
LEPTON BEAMS
METALS
PARTICLE BEAMS
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
SPECTRA
SPECTROSCOPY
SPUTTERING
SURFACE PROPERTIES
TRANSITION ELEMENTS
X RADIATION
XENON IONS
ZINC
ZINC ALLOYS